Integration for Micro Systems

From different of conventional one, high quality result of measuring priority
| F50 | F60 | |||
| Optic quality | Number of inlet on object lens | NA=0.11 | 5 times larger to object:0.15, 10 times langer:0.30 20 times larger: 0.46 |
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| Number of inlet of on-look | At 0.7of zoom positions | NA=0.02 | - | |
| At 9.0 of zoom position | NA=0.11 | - | ||
| Scanning and screening quality at the use of 3CCD video camera adoption | 13.7[μm/pix]~ 1.13[μm/pix] |
2[μm/pix]~ 0.5[μm/pix] |
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| Expansion on particle measuring capacity | 5μm~1000μm (Depends on zoom position) |
1μm~200μm (Depends on object lens) |
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| Electric platform | Same as right but φ47mm | 8 slices load capacity at maximum for testing one of φ25mm | ||
| Range of flexibility of moving | 150mm×150mm | 100mm×100mm | ||
| Electricity power range in use weight | Lower than 1400w | Lower than 1400w | ||
| weight | Lighter than 150kg | Lighter than 150k | ||
| Set-up & adjustment | Automatic definition function to the rate of zoom |
| Automatic gap adjustment to platform position (main brain) | |
| software auto focus (hardware auto focus is option at depend on choice by F60) | |
| Measuring size & auto zoom positioning | |
| Automatic set-up for colors of screen | |
| analysis | Total look-chart & result modification |
| Observational confirmation on enlargement & analysis | |
| Annalistic graph on screen | |
| Reanalysis function on installed motion screen | |
| Trend graph forming function |
This system is based on collaboration of MRL and IMS
*All speculation may be changed without a notice